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X射线光学元件

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X-ray diffraction grating


Rectangular grooves with period from 0.5 μm
Groove height up to 200 nm
Grating size up to 20×20 mm2

Substrate: Si, SiO2

Coatings:

  • thin films W, Al, Au etc. 

  • multilayer mirrors W/Si, Mo/Be, Cr/Sc etc.

  • substrate etching


Multilayer diffraction grating

   period D=2 μm     50 W/Si bilayers (d=50 Å)


2D grating with round reflecting multilayer elements


X-ray focusing


Grazing incidence phase Fresnel zone plates 1D or 2D x-ray focusing
Groove height up to 100 nm

Zone plate size:

  • 1D focusing up to 50×50 mm2

  • 2D focusing up to 20×0.2 mm2


Substrate: Si, SiO2

Coatings: 

  • thin films W, Al, Au etc

  • substrate etching 


                        Central and outermost zones of grazing incidence zone plate


Hartmann wavefront sensor plates

Description

- 2D arrays of holes for wavefront sensing

- Etched into silicon using deep reactive ion etching technology

- Possibilities for high-Z materials (Au, W)



其他订制要求,详情可咨询上海昊量光电设备有限公司。